Sputtering limits versus signal-to-noise limits in the observation of Sn balls in a Ga+ microscope

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

سال: 2008

ISSN: 1071-1023,1520-8567

DOI: 10.1116/1.3013306